Implementation of an ultra deep X-ray lithography (UDXRL) system at CAMD

Description

Freiburg (Breisgau), University, Diss., 2001.

Links & Downloads

1. http://www.freidok.uni-freiburg.de/volltexte/407/pdf/dissertation-GAigeldinger.pdf
2. http://www.freidok.uni-freiburg.de/volltexte/407
3. http://deposit.ddb.de/cgi-bin/dokserv?idn=964435748

Tags

Polymethylmethacrylate

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76330559
Date	January 1900
Creators	Aigeldinger, Georg.
Publisher	[S.l. : s.n.,
Source Sets	OCLC
Language	English
Detected Language	English