Abstract
This paper reports about a precision positioning XY stage utilizing flexure hinges and piezoelectric actuators. XY stage was designed with the aim of reducing the stress-concentration of flexure hinges and the low interference between two actuating axes. Utilized the expression of matrix to figure out the properties of the bellow-type flexure hinges, and proved these by mathematical software. Experiments demonstrated that the stage actuated by a stairstep driving signal with maximum displacement 1.3£gm and interference 50nm along X axis; along Y axis with maximum displacement 0.8£gm and interference 11nm. The stage actuated by a ramp signal with maximum displacement 1.2£gm and interference 45nm along X axis; along Y axis with maximum displacement 0.9£gm and interference 35nm. The finite element method (FEM) was used to analyse the stress-concentration of the stage. and the simulated results were compared with the experiments. Referred to the testing results, the target object could be moved in the aimed position accurately.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0805104-130920 |
| Date | 05 August 2004 |
| Creators | Huang, Bo-Tse |
| Contributors | Wei-Ching Yeh, Chii-Rong Yang, Yung-Tien Liu, You-Min Huang, Yeong-Maw Hwang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0805104-130920 |
| Rights | not_available, Copyright information available at source archive |
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