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Shallow trench isolation process in microfabrication for flash (NAND) memory

Thesis (M.S.)--University of Missouri-Columbia, 2008. / The entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file. Title from title screen of research.pdf file (viewed on September 2, 2008) Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/244796587
Date January 2008
CreatorsGarud, Niharika Triplett, Gregory Edward,
PublisherColumbia, Mo. : University of Missouri-Columbia,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeElectronic books. Electronic dissertations.
SourceFreely available online

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