This thesis is based on the series of scholarly article dedicated to the issue ofpumping in the differential scanning chamber of an environmental scanning microscope. The thesis is based on Danilatos’s study where the pumping of the differential pumped chamber is solved by means of the Monte Carlo statistical method. The thesis performs analysis of gas flow at low pressures through orifice separating the spaces with a large pressure drop Dr. Danilate. The analyses will be used for the design of the experimental chamber which will serve for the experimental evaluation of the flow results in the chamber using the continuum mechanics.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:442557 |
| Date | January 2021 |
| Creators | Mardanova, Elvira |
| Contributors | Bílek, Michal, Maxa, Jiří |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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