A low-loss polyimide/Ta2O5/SiO2 antiresonant reflecting optical waveguide (ARROW) at quasi-antiresonant condition is presented for the first time. The ARROW device was fabricated using both the organic and dielectric thin film technologies. It consisted of the fluorinated polyimide, tantalum pentoxide (Ta2O5) and silicon dioxide (SiO2) hybrid layers deposited on a Si substrate. For TE polarized light, the propagation loss of the waveguide as low as 0.4 dB/cm was obtained at 1.3 mm. The propagation loss for TM polarized light was 1.5 dB/cm. An ARROW waveguide fabricated using the polyimide/Ta2O5/polyimide material system is also presented for comparison.
In addition, anisotropic etching of Si-V grooves were formed using the EDP solution, and room temperature sputtered Ta2O5 was used as the etching mask. At a etching temperature of 1200C, the under cut of the V-groove is 1.6mm
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0619101-175105 |
| Date | 19 June 2001 |
| Creators | Lan, Ying-Che |
| Contributors | Way-Seen Wang, Ming-Kwev Lee, A.K Chu, Tao-Yuan Chang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0619101-175105 |
| Rights | unrestricted, Copyright information available at source archive |
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