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A Study of Flexural Plate Wave Device with High C-axis Orientation ZnO Piezoelectric Film and Interdigital Transducer

By integrating Nanotechnology and MEMS technology, this thesis aims to research a flexural-plate wave (FPW) sensor for testing Immunoglobulin E (IgE) concentration in blood serum, a significant index for the diagnosis of allergies. The traditional methods of blood assay are time-consuming and costly, and its average accuracy of only 60-70 percent. After compare the major four kinds of acoustic sensor, the FPW sensor demonstrates a high accuracy, high sensitivity, low operation frequency, low diagnosis time and low cost.
This thesis utilizes a reactive RF sputter system to deposite the piezoelectric ZnO thin film. To obtain the high C-axis orientation (002) characteristic of ZnO membrane, many parameters such as substrate temperature, Ar/O2 ratio and RF power have been adjusted and optimized during the sputtering process. The effects of varied parameters will be investigated and analysis by using SEM or XRD facilities.
In this study, we combined the high figure-of-merits ZnO deposition techniques and single-side anisotropic silicon etch process to implement the process integration of FPW device. Finally, this research has demonstrated a 50-60MHz center frequency can be extracted from such silicon-based FPW microsensor.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0713106-172443
Date13 July 2006
CreatorsChang, Yi-Wen
ContributorsI-Yu Huang, Shiang-Hwua Yu, Lieh-hsi Lo, Jin-Chern Chiou, Ruey-Shing Huang
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0713106-172443
Rightscampus_withheld, Copyright information available at source archive

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