On this thesis work, design and construction of an up to date complete RF excitation system was intended. This excitation system is mainly based on highly efficient switching power generators and proper coupling of the power to the object plasma. This new excitation system design should answer the demands of today' / s progressed CO2 lasers on various power ranges. Though it could be used by a large variety of applications including RF plasma and RF heating, on the first occasion in order to define design considerations, this system is to be exploited by RF excited fast flow and RF excited slab CO2 laser constructions.
Identifer | oai:union.ndltd.org:METU/oai:etd.lib.metu.edu.tr:http://etd.lib.metu.edu.tr/upload/12605394/index.pdf |
Date | 01 September 2004 |
Creators | Kurucu, Salur Riza |
Contributors | Esendemir, Akif |
Publisher | METU |
Source Sets | Middle East Technical Univ. |
Language | English |
Detected Language | English |
Type | M.S. Thesis |
Format | text/pdf |
Rights | To liberate the content for public access |
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