An alkyl-containing self-assembled monolayer is grafted on the silicon surface by a nature process in solutions. The alkyl thin film was used as the lubricant for the silica interface, usually applied to the MEMS or NENS domains. The ability of reducing friction for silica device at room temperature was improved, but little was known as the thin films existed at higher temperature during device was working or operating. In this study, we used Hexyltrichlorosilane (C6), Dodecyltrichlorosilane (C12), and Octadecyltrichlorosilane (C18) molecules to form self-assembled monolayers (SAMs) on silicon, and these monolayers exhibited different molecular packing properties due to different interactions between the molecules. Fourier transform infrared spectroscopy (FTIR) revealed that the short chain-length (C6) molecules exhibited poor packing on the surface at room temperature, and that the molecular packing of C6 was thermally stable up to 500 K. But the C12 and C18 monolayers exhibited abrupt blue shifts in FTIR at temperatures between 300 and 575 K, with stable packing observed over several temperature ranges. Furthermore, water contact angle measurements showed the C6, C12, and C18 molecular films changed from hydrophobic to hydrophilic as the sample temperature was increased. Atomic force microscopy (AFM) images revealed that pits had formed in the C18 monolayer after the temperature was increased to 460 K, which were caused by the molecular reorganization of C18 on the surface. This resulted in an abrupt change in the friction coefficient for the C18 monolayer at 460K as compared to the short C6 and C12 monolayers. However, the friction coefficients for all the SAM films still increased with temperature. Understanding the temperature-dependent behavior of SAM film molecules will assist in the design of better anti-wear monolayers to improve performance and increase lifetimes in modern MEMS and NEMS devices.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0805108-151544 |
| Date | 05 August 2008 |
| Creators | Liu, Yi-len |
| Contributors | Chao-ming Chiang, Michael Y. Chiang, Shuchen Hsieh |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0805108-151544 |
| Rights | campus_withheld, Copyright information available at source archive |
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