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Run-to-run control of overlay and linewidth in semiconductor manufacturing

Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references (leaves 164-176). Available also in a digital version from Dissertation Abstracts.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/50487513
Date January 2001
CreatorsBode, Christopher Allen,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceDigital version:

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