A process for the removal of Cu and Fe from the surface of silicon substrates based on heterogeneous gas-solid chelation chemistry /

Description

Thesis (Ph. D.)--Lehigh University, 1996. / Includes vita. Includes bibliographical references.

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Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/36631195
Date	January 1996
Creators	George, Mark A.,
Source Sets	OCLC
Language	English
Detected Language	English
Type	Academic dissertations