M.Ing. (Electrical & Electronic Engineering) / Measurement techniques and software were developed for the automation of IV (Current-voltage), CV (Capacitance-voltage), Ct (Capacitance-time), and QC (Charge-capacitance) measurements of semiconductor devices. Apparatus used are a computer and programmable peripheral measurement instruments such as a pico-ammeter, capacitance-voltage meter and voltmeter. The theory concerning the device characteristics was adapted for compatibility with the equipment and the software. Various electrical parameters of diodes, bipolar and field effect transistors can be obtained with the IV measurements. Various characteristics of MOS capacitors are obtained for example to evaluate the oxidation process during semi conductor production. A probe station was developed for obtaining device characteristics at wafer stage.
Identifer | oai:union.ndltd.org:netd.ac.za/oai:union.ndltd.org:uj/uj:12426 |
Date | 30 September 2014 |
Creators | Vorster, Franzette |
Source Sets | South African National ETD Portal |
Detected Language | English |
Type | Thesis |
Rights | University of Johannesburg |
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