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Rekenaargebaseerde instrumentasiestelsel vir halfgeleierkarakterisering

M.Ing. (Electrical & Electronic Engineering) / Measurement techniques and software were developed for the automation of IV (Current-voltage), CV (Capacitance-voltage), Ct (Capacitance-time), and QC (Charge-capacitance) measurements of semiconductor devices. Apparatus used are a computer and programmable peripheral measurement instruments such as a pico-ammeter, capacitance-voltage meter and voltmeter. The theory concerning the device characteristics was adapted for compatibility with the equipment and the software. Various electrical parameters of diodes, bipolar and field effect transistors can be obtained with the IV measurements. Various characteristics of MOS capacitors are obtained for example to evaluate the oxidation process during semi conductor production. A probe station was developed for obtaining device characteristics at wafer stage.

Identiferoai:union.ndltd.org:netd.ac.za/oai:union.ndltd.org:uj/uj:12426
Date30 September 2014
CreatorsVorster, Franzette
Source SetsSouth African National ETD Portal
Detected LanguageEnglish
TypeThesis
RightsUniversity of Johannesburg

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