This PhD thesis sets out to investigate novel Silicon Carbide (SiC) based field effect devices (Schottky and transistor structures), with gas sensitive layers for monitoring hydrogen and propene gases at high temperatures. The devices developed by the author were shown to exhibit sensitivities at least 1~2 orders of magnitude (voltage shift, ¢V) higher than those reported in literature. Not only did the author seek to investigate the gas sensing potential of such devices, but also he set out to study, analyse and establish the gas interaction mechanism of these novel sensors. High temperature tolerant hydrogen and hydrocarbon sensors are required in numerous applications such as: aerospace, nuclear power plant, space exploration and exhaust monitoring in automobiles. Monitoring these gases in a reliable and efficient manner is of great value in these applications, not only from a safety point of view but also for economical reasons. Hence there is an absolute necessity for simple, efficient and high performance sensors not only for monitoring and leak detection but also to function as part of a safety device to prevent accidents. The proposed sensor structure of combining SiC with gas sensitive oxide layers allow them to be operated at high temperatures, making them extremely appealing for direct or in-situ monitoring applications. The microstructural analysis performed using Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), X-ray Photoelectron Spectroscopy (XPS) and Rutherford Backscattering Spectroscopy (RBS) provides no evidence of inter-diffusion between different layers, in spite of the sensors being annealing at 650 in O2, H2 and C3H6 atmospheres for approximately 50hrs. Samples in different conditions (as deposited, annealed and tested) were compared. The electrical properties of the MROSiC (current-voltage, I-V and capacitance-voltage, C-V characteristics) and MESFET (drain current-source drain voltage (ID-VSD) and transfer, (ãID-H2 concentration) characteristics) devices were measured in the presence and absence of H2 and C3H6. Several parameters such as barrier height, saturation currents, pinch-off voltages and channel conductance were determined from the electrical characteristics, and their influence on the device performance was studied. The authorfs proposed gas interaction model based on energy band diagram is well supported by the experimental data obtained.
| Identifer | oai:union.ndltd.org:ADTP/210386 |
| Date | January 2008 |
| Creators | Kandasamy, Sasikaran, s3003480@student.rmit.edu.au |
| Publisher | RMIT University. Electrical and Computer Engineering |
| Source Sets | Australiasian Digital Theses Program |
| Language | English |
| Detected Language | English |
| Rights | http://www.rmit.edu.au/help/disclaimer, Copyright Sasikaran Kandasamy |
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