Characterisation of Si-Si bonded wafers and low-k silica xerogel films by means of optical spectroscopies

Description

Chemnitz, Techn. University, Diss., 2003. / Dateiformat: PDF.

Links & Downloads

1. http://deposit.ddb.de/cgi-bin/dokserv?idn=968789633
2. http://archiv.tu-chemnitz.de/pub/2003/0035/index.html

Tags

Silicium Siliciumdioxid

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76642376
Date	January 2003
Creators	Himcinschi, Cameliu Constantin.
Publisher	[S.l. : s.n.],
Source Sets	OCLC
Language	English
Detected Language	English
Source	LF