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Silicon carbide epitaxial growth using methylsilanes as gas sources

Thesis (Ph. D.)--West Virginia University, 2004. / Title from document title page. Document formatted into pages; contains x, 119 p. : ill. Includes abstract. Includes bibliographical references (p. 108-114).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/56801432
Date January 1900
CreatorsPeng, Charlie Y.
PublisherMorgantown, W. Va. : [West Virginia University Libraries],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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