Return to search

Advanced CMP processes for special substrates and for device manufacturing in MEMS applications /

Thesis (doctoral)--VTT Micronova, 2006. / Includes bibliographical references. Also available on the World Wide Web.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/162591640
Date January 1900
CreatorsKulawski, Martin.
Publisher[Espoo, Finland] : VTT Technical Research Centre of Finland,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

Page generated in 0.0016 seconds