This paper describes simulation, technology- and process development for the manufacturing of single mode polymeric waveguides by photolithography. Simulations for single mode operation in O- and C-band are carried out. Waveguides are directly patterned with UV-photolithography using Ormocere®-material. Fiber to waveguide coupling and near field are characterized.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:78608 |
| Date | 28 March 2022 |
| Creators | Weyers, David, Nieweglowski, Krzysztof, Lorenz, Lukas, Bock, Karlheinz |
| Publisher | IEEE |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/acceptedVersion, doc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | 978-0-9568086-7-7, 10.23919/EMPC53418.2021.9584994, info:eu-repo/grantAgreement/Bundesministerium für Bildung und Forschung/Mikroelektronik. Vertrauenswürdig und nachhaltig. Für Deutschland und Europa/16ME0315//Heterogene Photonik Elektronik Plattform für vertrauenswürdige quelloffene Prozessoren/VE-Silhouette |
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