High-resolution studies of silicide-films for nano IC-components /

Description

Diss. (sammanfattning) Uppsala : Uppsala universitet, 2005. / Härtill 7 uppsatser.

Links & Downloads

1. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-4836
2. urn:nbn:se:uu:diva-4836

Tags

Tunna skikt (ytfysik)

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/186752787
Date	January 2005
Creators	Jarmar, Tobias,
Publisher	Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör],
Source Sets	OCLC
Language	English
Detected Language	Swedish