In this paper, single mode buried optical waveguides based on hybrid sol-gel glasses and PECVD oxide were fabricated. Two different buried waveguide devices are investigated, and their optical characteristics are characterized. The first buried waveguide was obtained
by etching a shallow trench on SiON layer. Then sol-gel material used as the guiding layer was deposited onto the layer and cured in proper conditions. Finally, the waveguides were completed by coating a sol-gel top cladding layer onto the guiding layer. The propagation loss of the
waveguide is 0.59dB/cm at £f=1310nm.
The second buried waveguide was fabricated by etching a trench of 5£gm on SiON layer and then burying sol-gel material into the trench.Proximity printing was used to define the waveguide core on sol-gel films.The waveguide was packaged for measurement after coating a UV glue
on top of the core layer. The propagation losses of this waveguide device are 0.6dB/cm and 0.57dB/cm for TE and TM polarized lights. The coupling losses are 2.21dB and 2.41dB for TE and TM lights.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0616104-221605 |
| Date | 16 June 2004 |
| Creators | Wu, Yu-zhi |
| Contributors | Ann-kao Chu, Yi-jen Chiu, Ju-ta Tung, Kuang-yu Hsieh, Ken-huang Lin |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0616104-221605 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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