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Analýza tvaru sacích kanálů současné koncepce diferenciálně čerpané komory / Analysis of the shape of the intake ports of the current concept differentially pumped chamber

This master´s thesis discusses the analysis of the shape of the intake ports of differentially pumped chamber for the current concept. The first part is an introduction to the microscopy issue, then it is focused on ESEM microscopes and it also includes a describtion of the Flow dynamics and a mathematical describtion. In the following chapters the software Solid Works, where the model of differentially pumped chamber is created, and the software Ansys Fluent, which is used for analysis, are described. The second part concerns the proposed concepts and the results of their simulations. At the end of the work the results are analyzed and evaluated.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:221313
Date January 2015
CreatorsBílek, Michal
ContributorsVyroubal, Petr, Maxa, Jiří
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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