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Vliv tlaku v komoře vzorku na podmínky diferenciálního čerpání / Influence of pressure in the specimen chamber to the conditions of the differential pumping

The paper primarily outlines fundamental issues of electron microscopy. The paper follows with analysing pumping of gas into EREM sample chambers at various pressure levels by using SolidWorks Flow Simulation in SolidWorks system. The results of analyses are assessed with respect to requirements so that the pressure in the track of primarily electrons is as low as possible with the view to reduce probability of its scattering.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:218730
Date January 2010
CreatorsPlaczek, Roman
ContributorsŠpinka, Jiří, Maxa, Jiří
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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