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Effect of operating parameters on deposition uniformity in broadcast applications /

Thesis (M.S.)--Ohio State University, 1984. / Includes bibliographical references (leaves 129-130). Available online via OhioLINK's ETD Center

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/11875884
Date January 1984
CreatorsAzimi, Amir H.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceConnect to resource

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