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Optimisation of a closed-field unbalanced magnetron sputter process : titanium aluminium nitride

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:308219
Date January 1995
CreatorsPerry, Duncan
PublisherUniversity of Salford
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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