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Study of sputtered tantalum pentoxide and aluminum oxide thin films and their multistacks for embedded capacitor applications

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1. https://stars.library.ucf.edu/rtd/1031

Identifer	oai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:rtd-2030
Date	01 January 2003
Creators	Sood, Sumant
Publisher	University of Central Florida
Source Sets	University of Central Florida
Language	English
Detected Language	English
Type	text
Source	Retrospective Theses and Dissertations