Return to search

Optimisation of a closed-field unbalanced magnetron sputter process : titanium aluminium nitride

No description available.

1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.308219

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:308219
Date	January 1995
Creators	Perry, Duncan
Publisher	University of Salford
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation