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Simulation des reaktiven Magnetron-Sputterns /

Universiẗat, Diss., 2006--Giessen.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/180173400
Date January 2007
CreatorsPflug, Andreas.
PublisherStuttgart : Fraunhofer-IRB-Verl.,
Source SetsOCLC
LanguageGerman
Detected LanguageGerman

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