| Identifer | oai:union.ndltd.org:NAGOYA/oai:ir.nul.nagoya-u.ac.jp:2237/11160 |
| Date | 04 1900 |
| Creators | Gosálvez, Miguel A., Xing, Yan, Sato, Kazuo, 佐藤, 一雄 |
| Publisher | IEEE |
| Source Sets | Nagoya University |
| Language | English |
| Detected Language | English |
| Type | Article(publisher) |
| Rights | Copyright © 2008 IEEE. Reprinted from Journal of Microelectromechanical Systems. v.17, n.2, 2008, p.410-431. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. |
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