Determination of mechanical properties of very thin films is rather difficult task as all of currently using testing techniques have some weakness. This master’s thesis deals with microcompressive test and bulge test. Finite element simulations of the two methods were carried out in order to better understanding of experimental record. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared from Al film deposited on Si substrate using FIB. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using FE modeling is suggested in the thesis. Second part of the work is focused on modeling of bulge test. Pressure is applied on freestanding SiNx film while deflection of the film is measured. Stress state in the film is biaxial making determination of mechanical properties of the film more complicated. The goal is to present how to model the whole problem. In addition, preparation of the specimens was simulated to estimate residual stress in the film. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:230777 |
| Date | January 2013 |
| Creators | Petráčková, Klára |
| Contributors | Pokorný, Pavel, Náhlík, Luboš |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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