This work presents the successful development of micro-origami sensorics by 3D self-assembling and reconfiguring in space integrated thin-film magnetic sensors, which rely on anisotropic (AMR) and giant magnetoresistance (GMR). Stimuli responsive polymeric materials able to reshape into mesoscale 3D “Swiss-roll” and polygonal architectures accomplish a strain driven parallel spatial realignment of magnetic sensors from the in-plane state. High performance 3D magnetic vector angular encoders demonstrates the successful realization of complex sensor configurations. The proposed concepts rely on parallel wafer scale processes, which allow for a monolithic fabrication of 3D sensor arrays and pave the way towards active sensory matrix circuits.
As a proof of this concept, magneto-resistive Wheatstone bridge sensors are developed and integrated in the self-assembling platform at predefined rigid regions and integrated with an active matrix backplane circuit. This circuit, based on a-IGZO TFT technology, is specially designed for the operation with the Wheatstone bridge differential sensors and optimized to be compatible with the micro-origami self-folding technology. Such an active sensory matrix system with integrated 3D self-assembled pixels is called Integrated Micro-Origami Sensors or in short IMOS. IMOS is capable for static and dynamic mapping of magnetic fields enabling spatiotemporal mapping of artificial magnetic hair arrays embedded in an elastic skin layer. The presented results offer a fresh strategy for large area integration of microscale 3D electronic devices with various vector functionalities in active matrix circuits, which are of great interest in novel robotics, bioelectronics and diagnostic systems.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:90762 |
| Date | 16 May 2024 |
| Creators | Becker, Christian |
| Contributors | Schmidt, Oliver G., Gemming, Sibylle, Technische Universität Chemnitz, Leibniz Institut für Festkörper- und Werkstoffforschung Dresden |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/updatedVersion, doc-type:doctoralThesis, info:eu-repo/semantics/doctoralThesis, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
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