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Micromachined capacitive silicon bulk acoustic wave gyroscopes

Thesis (Ph.D)--Mechanical Engineering, Georgia Institute of Technology, 2009. / Committee Chair: Dr. Farrokh Ayazi; Committee Co-Chair: Dr. F. Levant Degertekin; Committee Member: Dr. Paul Kohl; Committee Member: Dr. Peter Hesketh; Committee Member: Dr. Suresh K. Sitaraman. Part of the SMARTech Electronic Thesis and Dissertation Collection.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/642354433
Date January 2008
CreatorsJohari, Houri.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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