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Design, fabrication, and characterization of a MEMS thermal switch and integration with a dynamic micro heat engine

Thesis (Ph. D. engineering science)--Washington State University, December 2007. / Includes bibliographical references (p. 181-191).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/184986227
Date January 2007
CreatorsCho, Jeong-Hyun,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceOnline access for everyone

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