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An evaluation system for mechanical and electrical characterization of MEMS devices

Thesis--Auburn University, 2009. / Abstract. Vita. Includes bibliographical references (p. 67-69).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/318363169
Date January 2009
CreatorsKim, Seong Jin, Dean, Robert Neal,
PublisherAuburn, Ala.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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