A study on the material and device characteristics of hafnium oxynitride MOSFETs with TaN gate electrodes

Description

Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: Jack C. Lee. Vita. Includes bibliographical references. Also available from UMI.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/1153/kangc691756.pdf
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3143280

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57551111
Date	January 2004
Creators	Kang, Changseok, Lee, Jack Chung-Yeung,
Source Sets	OCLC
Language	English
Detected Language	English