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Characterization of chemical structure, morphology, and mechanical response of polyurethane surface domains as a result of exposure to common chemical mechanical planarization (CMP) environments

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Identiferoai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:rtd-2657
Date01 October 2002
CreatorsRamsdell, Jeffrey E.
PublisherSTARS
Source SetsUniversity of Central Florida
LanguageEnglish
Detected LanguageEnglish
Typetext
SourceRetrospective Theses and Dissertations

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