This master thesis deals with examination of the parameters of low temperature plasma which is used for the deposition of thin layer of ITO. The method which is used in this thesis is the probe diagnostics. This thesis is divided into two parts. The first is the theoretical part, in which the basic parameters of low temperature plasma, principles of the probe diagnostics, and theories for this method are explained. The second part is the practical part, which presents the results of the measurement depending on changes in conditions of deposition.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:371679 |
| Date | January 2017 |
| Creators | KOZLOVÁ, Miroslava |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
Page generated in 0.0015 seconds