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Design and testing of a lateral field excited rate monitor for use in thin film deposition systems /

Thesis (M.S.) in Electrical Engineering--University of Maine, 2009. / Includes vita. Includes bibliographical references (leaves 110-113).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/503461062
Date January 2009
CreatorsSgambato, Kristopher,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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