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Analysis of effective mechanical properties of thin films used in microelectromechanical systems /

Thesis (Ph.D.)--Rochester Institute of Technology, 2007. / Typescript. Includes bibliographical references (leaves 139-145).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/182520741
Date January 2007
CreatorsPasupuleti, Ajay.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceOnline version of thesis

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