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Fabrication, materials, and characterization for efficient MEMS power generation

Thesis (M.S. in Materials Science and Engineering)--Washington State University. / Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/56430398
Date January 2004
CreatorsMartinez, Julia Vivian,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceOnline access for everyone

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