Estudo e caracterizacao de filmes finos de nitreto de titanio obtidos por evaporacao a arco catodico de deposicao a vacuo

Description

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05586.pdf: 7089535 bytes, checksum: 4459c81f8f267c76f9328265ae1fc952 (MD5) / Dissertacao (Mestrado) / IPEN/D / Instituto de Pesquisas Energeticas e Nucleares - IPEN/CNEN-SP

Links & Downloads

1. http://repositorio.ipen.br:8080/xmlui/handle/123456789/10377

Tags

thin films

titanium nitrides

evaporation

deposition

vacuum coating

Additional Fields

Identifer	oai:union.ndltd.org:IBICT/oai:10.40.40.102:123456789/10377
Date	09 October 2014
Creators	GUERREIRO, SERGIO S.
Contributors	Orientador: Jose Octavio Armani Paschoal
Source Sets	IBICT Brazilian ETDs
Detected Language	Unknown
Type	info:eu-repo/semantics/publishedVersion, info:eu-repo/semantics/masterThesis
Format	96
Source	reponame:Repositório Institucional do IPEN, instname:Instituto de Pesquisas Energéticas e Nucleares, instacron:IPEN
Coverage	N
Rights	info:eu-repo/semantics/openAccess