Chemical vapor deposition technology is often by using in the one of Wafer panel Foundry process, the heat transfer coefficient on the top substrate surface is the very important influence parameter in the manufacturing process. For this reason, the main object of this thesis is apply liquid crystals heat transfer measurement technique to set up a temperature measurement experiment system of transient thermochromatic liquid crystals and application simulating CVD process technique. Furthermore, an experimental is carried out in the present study to investigate the characteristics of heat transfer experiment study analysis resulting from a low speed air jet through the nozzle eccentric disc outlet impinging onto a rectangular acclivitous angles substrate confined in a vertical rectangular chamber. Finally, heat transfer coefficient empirical equations of the three relationship are proposed to Nusselt number correlate the effect of Reynolds number¡BSeparation distances are Ratio of outlet and acclivitous substrate surface¡BAngles of rectangular acclivitous substrate.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0901108-113431 |
| Date | 01 September 2008 |
| Creators | Guan, Hua-yun |
| Contributors | Chien-Yuh Yang, Jen-Jyh Hwang, Ru Yang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0901108-113431 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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