Plasma characterization & thin film growth and analysis in highly ionized magnetron sputtering /

Description

Diss. (sammanfattning) Linköping : Linköpings universitet, 2005. / Härtill 7 uppsatser.

Links & Downloads

1. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-4147

Tags

Tunna skikt (ytfysik)

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/185714849
Date	January 2005
Creators	Alami, Jones,
Publisher	Linköping : Dept. of Physics and Measurement Technology, Univ.,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Sammanfattning och fulltext från Linköping University Electronic Press