The development of analytical procedures for the analysis of selected reactive process gases in order to use them in the production of semiconductors without sample preparation is the main task of the presented work. Different atomic spectrometric methods e.g. Electrothermal Atomic Absorption Spectrometry (ETAAS), Microwave Induced Plasma Atomic Emission Spectrometry (MIP-AES), Non dispersive Atomic Fluorescence Spectrometry and Inductively Coupled Plasma Atomic Emission Spectrometry (ICP-AES) have been used for the development of the procedures. The physico-chemical features of the matrix request a fitted sampling e.g. suitable, non corrosive material of the tubes and unions, and modified analytical system. The described ETAAS system with an automated sampling system allows the determination of Cu, Fe and Ni in gaseous HCl, Cl2, BCl3 and SiH2Cl2 without sample preparation. A comparison of calibration with standard aqueous solutions as well as standard additions and calibration with a gaseous standard has shown the negligible influence of the matrix on the calibration using the ETAAS system.
| Identifer | oai:union.ndltd.org:DUETT/oai:DUETT:duett-03312005-133704 |
| Date | 12 April 2005 |
| Creators | Telgheder, Ursula |
| Contributors | Prof. Dr. Alfred Golloch, Prof. Dr. Jose Broekaert |
| Publisher | Gerhard-Mercator-Universitaet Duisburg |
| Source Sets | Dissertations and other Documents of the Gerhard-Mercator-University Duisburg |
| Language | German |
| Detected Language | English |
| Type | text |
| Format | application/octet-stream, application/pdf, text/html |
| Source | http://www.ub.uni-duisburg.de/ETD-db/theses/available/duett-03312005-133704/ |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. Hiermit erteile ich der Universitaet Duisburg das nicht-ausschliessliche Recht unter den unten angegebenen Bedingungen, meine Dissertation, Staatsexamens- oder Diplomarbeit, meinen Forschungs- oder Projektbericht zu veroeffentlichen und zu archivieren. Ich behalte das Urheberrecht und das Recht das Dokument zu veroeffentlichen und in anderen Arbeiten weiterzuverwenden. |
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