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Synthesis of aluminum nitride thin films at lower temperatures by metalorganic chemical vapor deposition /

Thesis (Ph. D.)--University of Washington, 1996. / Vita. Includes bibliographical references (leaves [158]-168).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/36642983
Date January 1996
CreatorsKidder, John N.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeTheses
SourceConnect to this title online; UW restricted

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