Surface investigations of the atomic layer growth mechanism in aluminum nitride thin film deposition using dimethylethylamine alane and ammonia /

Description

Thesis (Ph. D.)--University of Washington, 1999. / Vita. Includes bibliographical references (leaves [103]-112).

Links & Downloads

1. http://hdl.handle.net/1773/9853

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/42816008
Date	January 1999
Creators	Kuo, Jason Se-Yung.
Source Sets	OCLC
Language	English
Detected Language	English
Type	Theses
Source	Connect to this title online; UW restricted