Temperature control and characterization of silicon-germanium growth by rapid thermal chemical vapor deposition

Description

Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.

Links & Downloads

1. http://www.lib.utexas.edu/etd/r/d/2002/hwangs022/hwangs022.pdf#page=3
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3081093

Tags

Germanium. Silicon. Vapor-plating.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/52933913
Date	January 2002
Creators	Hwang, Sung-Bo,
Source Sets	OCLC
Language	English
Detected Language	English