Motion control of a wafer stage a design approach for speeding up IC production /

Description

Thesis (doctoral)--Technische Universiteit Delft, 1997. / Vita. Includes bibliographical references (p. 267-282) and index.

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1. http://catalog.hathitrust.org/api/volumes/oclc/39902571.html

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/606953116
Date	January 1900
Creators	Roover, Dick de.
Publisher	Delft, Netherlands : Delft University Press,
Source Sets	OCLC
Language	English
Detected Language	English