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Motion control of a wafer stage a design approach for speeding up IC production /

Thesis (doctoral)--Technische Universiteit Delft, 1997. / Vita. Includes bibliographical references (p. 267-282) and index.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/301354930
Date January 1900
CreatorsRoover, Dick de.
PublisherDelft, Netherlands : Delft University Press,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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