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Elektrotransportní vlastnosti nanostruktur připravených metodou FIB / Electrotransport properties of the nanostructures fabricated by the FIB

The aim of this work is fabrication of nanostructures and measurement of their electrotransport properties. There are two different methods used for fabrication - electron beam lithography with sputtering of thin films and focused ion beam with deposition from gas phase. I-V characteristic was measured for characterisation of as prepared nanostructures - wires. Material of wires prepared by using of electron beam lithography was permalloy - an alloy of iron and nickel. Second types of wires prepared by using of chemical vapor deposition induced by focused ion beam was platinum based.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:229474
Date January 2011
CreatorsOstřížek, Petr
ContributorsKolíbalová, Eva, Urbánek, Michal
PublisherVysoké učení technické v Brně. Fakulta strojního inženýrství
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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