The aim of this work is fabrication of nanostructures and measurement of their electrotransport properties. There are two different methods used for fabrication - electron beam lithography with sputtering of thin films and focused ion beam with deposition from gas phase. I-V characteristic was measured for characterisation of as prepared nanostructures - wires. Material of wires prepared by using of electron beam lithography was permalloy - an alloy of iron and nickel. Second types of wires prepared by using of chemical vapor deposition induced by focused ion beam was platinum based.
Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:229474 |
Date | January 2011 |
Creators | Ostřížek, Petr |
Contributors | Kolíbalová, Eva, Urbánek, Michal |
Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
Source Sets | Czech ETDs |
Language | Czech |
Detected Language | English |
Type | info:eu-repo/semantics/masterThesis |
Rights | info:eu-repo/semantics/restrictedAccess |
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