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Metoda napěťového kontrastu při detekci sekundárních elektronů scintilačním detektorem ve VP SEM / Voltage contrast method at detection of secondary electrons by scintillation detector in VP SEM

This thesis deals with scanning electron microscope working at higher pressure in the specimen chamber. The main goal was to study the voltage contrast on the PN junction of the transistor under suitable working conditions for using environmental scanning microscope. The observation of sample was enabled by a scintillation detector designed for observation of high pressure.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:219045
Date January 2011
CreatorsJabůrek, Ladislav
ContributorsŠpinka, Jiří, Jirák, Josef
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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