Abstract
A novel buried hybrid polymer waveguide using semiconductor processing technologies is presented. It has advantage of low cost, ease of fabrication, planar surface morphology of the device, and it is applicable in dense wavelength division multiplex (DWDM) systems.
The polymer waveguide consists of a polymer core buried in the SiO2 lower cladding on a Si substrate. The device was fabricated by first etching a trench into the SiO2 cladding. The surface of the waveguide was then planarized using the Benzocyclobutene (BCB) polymer. After etch back of the BCB polymer, the guiding core is formed in the trench region. Finally, a thin film layer of SOG (spin-on-glass) was coated on the top of the waveguide to isolate the core from the air. For TE polarized wave, the propagation loss as low as 0.59dB/cm is obtained. The propagation of TM wave is 0.65dB/cm. In addition, a multi-mode inference power splitter based on the buried waveguide structure is theoretically investigated.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0619101-175103 |
| Date | 19 June 2001 |
| Creators | Hsu, Chih-hung |
| Contributors | A. K. Chu, Huy-Wen Chang, Ru-Da Tung, An-Chung Su |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0619101-175103 |
| Rights | unrestricted, Copyright information available at source archive |
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