Employing metal iodides and oxygen in ALD and CVD of functional metal oxides /

Description

Diss. (sammanfattning) Uppsala : Univ., 2003. / Härtill 10 uppsatser.

Links & Downloads

1. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-3450

Tags

Ytkemi. Metallic oxides

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/186593453
Date	January 2003
Creators	Sundqvist, Jonas,
Publisher	Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör],
Source Sets	OCLC
Language	English
Detected Language	Swedish